TRACK

 Dimension

W : 1700 D : 800 H : 1350 

 Rotation RPM

Spinner

10~99rpm ±2rpm

100~999rpm ±2%

Scrubber

10~99rpm ±5rpm

100~999rpm ±5%

1000~6000rpm ±3%

 Max, Accelation

 ±50krpm/sec (0~10000rpm)

 PR

 Bellows Pump

 HMDS

 Canister Pressure

 Thinner

 Pressure

 EBR

 Canister Pressure, Cylinder

 Back Rinse

Canister Pressure

 Puddle Nozzle

 Canister Pressure, Cylinder

 DI Rinse

 Fixed

 Hot Plate

 250W, 2ea