Dimension

W : 1800 D : 1300 H : 1400 

 Max, Temp

350°C

 Temp Distribution

< ± 5℃ keeping

 Heater

 Sheath Heater

 Clean

 Class100 (0.3㎛)

 GAS

 CDA + O₂ + N₂

 Door

 Auto Shutter

 Cassette

 30slot / 40mm Pitch

 Dimension

W : 1800 D : 1300 H : 1700 

 Max, Temp

480°C

 Temp Distribution

<± 5℃ keeping

 Heater

 Sheath Heater

 Clean

 -

 GAS

 CDA + N₂

 Door

 Cylinder U/D

 Cassette

 10slot / 35mm Pitch

 Dimension

W : 640 D : 800 H : 1100 

 Max, Temp

150°C

 Temp Distribution

 <± 2℃ keeping

 Type

 Proximity Backing

 Heater

 MICA Heater

 GAS

 CDA + N₂

 Plate

 AI Hard Anodizing

 Substrate

 365 X 460 0.3 ~ 1.1T