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Home PRODUCT Display Equipments Vertical Furnace

Vertical Furnace

 

 



 



LED Wafer Vertical Furnace

 


Specification

 BODY Dimension

W : 800 D : 1200 H : 2600 

 SCR BOX

W : 500 D : 900 H : 1200

 Weight

100kg

 GAS

 N2, O2, CDA

 Wafer No

 MAX 150ea

 Loader Distance

 1140mm

 Loader U/D

 Ball Screw + Ball Bushing

 Chamber Max Temp

 1250˚C

 Process Temp

 400~1200˚C

 Temp Accuracy

 ±1˚C

 Dry Oxidation

 ±3%