LED Wafer Vertical Furnace |
Specification
BODY Dimension | W : 800 D : 1200 H : 2600 |
SCR BOX | W : 500 D : 900 H : 1200 |
Weight | 100kg |
GAS | N2, O2, CDA |
Wafer No | MAX 150ea |
Loader Distance | 1140mm |
Loader U/D | Ball Screw + Ball Bushing |
Chamber Max Temp | 1250˚C |
Process Temp | 400~1200˚C |
Temp Accuracy | ±1˚C |
Dry Oxidation | ±3% |
SI (System Innovation Co,.Ltd.) | ceo : Kim Jong Hoon
TEL : 031-8059-2864 | FAX : 031-8059-2865
Address : Jeongnamsandan 1-gil, Jeongnam-myeon, Hwaseong-si, Gyeonggi-do, Republic of Korea
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