BLAST-500 |
BLAST-500 is a semiconductor Epi. It is a facility to clean hydrofluoric acid powder and residues in piping that occur during the process, and it is a facility to safely clean the circulating chemical for cleaning without disassembling the pipe at the time of PM.
Specification
Dimension | W : 1800 D : 1610 H : 1800 |
Weight | 600kg |
GAS | CDA, N2 |
Tank | 800(W) X 600(D) X 1100(H), RFP, 500L |
PUMP | Bellows Pump 1set, 200L/min |
- Can be cleaned without disassembling and assembling pipes
- Chemical cleaning of hydrofluoric acid powder and residues in piping
- All processes are possible with one pump
- Installed in Chemical Tank: Possible to Chemical Recycle
- PLC control, 10 "Touch Panel use, program monitoring
- Cleaning, Rinse, Dry can proceed with recipe
- Interlock between valves possible
- Sight Glass can be used to visually check the cleaning status
- Capacity check with Tank Level Sensor
- Real-time Leak Detection with Ribbon Leak Sensor Installation
- Real-time pressure check in pipe by installing pressure sensor
- Temp sensor installed in pipe to monitor temperature
SI (System Innovation Co,.Ltd.) | ceo : Kim Jong Hoon
TEL : 031-8059-2864 | FAX : 031-8059-2865
Address : Jeongnamsandan 1-gil, Jeongnam-myeon, Hwaseong-si, Gyeonggi-do, Republic of Korea
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