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Home PRODUCT Another SUB Equipments Spin Rinse Dryer

Spin Rinse Dryer

 

 






SRD-121C

 


Specification 

 Dimension

W : 750 D : 835 H : 1555 

 Wafer Size

300mm

 Wafer No.

 2ea, 1Cassette

 Wafer Material

 Silicon, Glass

 Door

 Air Cylinder

 Loading

 Manual Loading

 Rinse Cycle

 0~1500rpm

 Dry Cycle

 0~1500rpm

 Heater

 60˚C / 1250W

 N2 Heater

80˚C / 750W 

 Process Time

180sec