에스아이

CDU,CRU

세정장비 및 공급장치

WET station

Spin Etcher

CDU, CRU

세정장비

Chemical Delivery Systems

CDU (Chemical Delivery Unit) / CRU (Chemical Recovery Unit)/

CDRU (Chemical Delivery & Recovery Unit)Chemical Supply System / DI Booster

Specification

CDU Supply	Air Diaphragm Pump
INTERLOCK	Main Exhaust Alarm N2 Pressure Alarm Bottle Pressure Alarm (3 Point) CDA Pressure Alarm Leak Sensor Alarm (2 Point) Bottle Set Alarm (3 Point) Door Open Alarm
	Bottle & Drum 수량 및 용량 선택 가능