세정장비 및 공급장치
WET station
Spin Etcher
CDU, CRU
세정장비
8" Auto WET Station |
Specification
Dimension | W : 1516 D : 1616 H : 2024 |
ROBOT | 2AXIS 2ea |
System Control | PLC (GM4) |
Display Operation | Touch Panel(10.2") |
Heating 방식 | Quartz Heater 2000W |
Cassette Loading | Hand Loading |
Drain | Aspirator or 일반 Drain |
Chemical Supply | Diaphragm Pump+N2 Level Sensor |
SRD-121C |
Specification
Dimension | W : 750 D : 835 H : 1555 |
Wafer Size | 300mm |
Wafer 진행 매수 | 25매, 1Cassette |
Wafer Material | Silicon, Glass |
Door | Air Cylinder |
Loading | Manual Loading |
Rinse Cycle | 0~1500rpm |
Dry Cycle | 0~1500rpm |
Heater | 60˚C / 1250W |
N2 Heater | 80˚C / 750W |
Process Time | 180sec |
㈜에스아이 | ceo : 김종훈
TEL : 031-8059-2864 | FAX : 031-8059-2865
Address : 경기도 화성시 정남면 정남산단1길 13
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