BLANC-150 / 202F

 Process

Back or Front Side Etching

 Through-Put

12WPH

 Handling

 Bernoulli Robot, Eco Chuck, Vacuum Robot

 Chuck

 PTFE, Bernoulli Chuck, 2000rpm

 Chamber

 1 or 2 Chamver, Up/Down

 Chemical

 Mixing & Circulation

 Dispenser

HF, DI, N2